7/22/2011	10:30:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/22/2011	10:30:40 AM	Recipe started at 10:30 AM
7/22/2011	10:30:40 AM	Helium valve closed
7/22/2011	10:30:40 AM	H2 valve closed
7/22/2011	10:30:40 AM	BCl3 valve closed
7/22/2011	10:30:40 AM	PH3 valve closed
7/22/2011	10:30:40 AM	SiCl4 pre valve closed
7/22/2011	10:30:40 AM	SiCl4 post valve closed
7/22/2011	10:30:40 AM	Main Vac valve closed
7/22/2011	10:30:40 AM	Bypass valve closed
7/22/2011	10:30:40 AM	Bubbler valve closed
7/22/2011	10:30:40 AM	Helium MFC set to  0.000000
7/22/2011	10:30:40 AM	H2 MFC set to  0.000000
7/22/2011	10:30:40 AM	BCl3 MFC set to  0.000000
7/22/2011	10:30:40 AM	PHl3 MFC set to  0.000000
7/22/2011	10:30:40 AM	SiCl4 MFC set to  0.000000
7/22/2011	10:30:40 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	10:30:40 AM	Tube furnace set to 0
7/22/2011	10:30:43 AM	H2 valve closed
7/22/2011	10:30:43 AM	BCl3 valve closed
7/22/2011	10:30:43 AM	PH3 valve closed
7/22/2011	10:30:43 AM	SiCl4 pre valve closed
7/22/2011	10:30:43 AM	SiCl4 post valve closed
7/22/2011	10:30:43 AM	Main Vac valve closed
7/22/2011	10:30:43 AM	Bypass valve closed
7/22/2011	10:30:43 AM	Bubbler valve closed
7/22/2011	10:30:43 AM	Helium valve opened
7/22/2011	10:30:43 AM	Helium MFC set to  500.000000
7/22/2011	10:30:43 AM	H2 MFC set to  0.000000
7/22/2011	10:30:43 AM	BCl3 MFC set to  0.000000
7/22/2011	10:30:43 AM	PHl3 MFC set to  0.000000
7/22/2011	10:30:43 AM	SiCl4 MFC set to  0.000000
7/22/2011	10:30:43 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	10:30:44 AM	Tube furnace set to 0
7/22/2011	10:31:15 AM	Run aborted at 10:31 AM
7/22/2011	10:31:15 AM	Helium valve closed
7/22/2011	10:31:15 AM	H2 valve closed
7/22/2011	10:31:15 AM	BCl3 valve closed
7/22/2011	10:31:15 AM	PH3 valve closed
7/22/2011	10:31:15 AM	SiCl4 pre valve closed
7/22/2011	10:31:15 AM	SiCl4 post valve closed
7/22/2011	10:31:15 AM	Bypass valve closed
7/22/2011	10:31:15 AM	Main Vac valve closed
7/22/2011	10:31:15 AM	Bubbler valve closed
7/22/2011	10:31:15 AM	Helium MFC set to  0.000000
7/22/2011	10:31:15 AM	H2 MFC set to  0.000000
7/22/2011	10:31:15 AM	BCl3 MFC set to  0.000000
7/22/2011	10:31:15 AM	PHl3 MFC set to  0.000000
7/22/2011	10:31:15 AM	SiCl4 MFC set to  0.000000
7/22/2011	10:31:15 AM	Tube furnace set to 0
7/22/2011	10:31:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/22/2011	10:38:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/22/2011	10:38:19 AM	Recipe started at 10:38 AM
7/22/2011	10:38:19 AM	Helium valve closed
7/22/2011	10:38:19 AM	H2 valve closed
7/22/2011	10:38:19 AM	BCl3 valve closed
7/22/2011	10:38:19 AM	PH3 valve closed
7/22/2011	10:38:19 AM	SiCl4 pre valve closed
7/22/2011	10:38:19 AM	SiCl4 post valve closed
7/22/2011	10:38:19 AM	Main Vac valve closed
7/22/2011	10:38:19 AM	Bypass valve closed
7/22/2011	10:38:19 AM	Bubbler valve closed
7/22/2011	10:38:19 AM	Helium MFC set to  0.000000
7/22/2011	10:38:19 AM	H2 MFC set to  0.000000
7/22/2011	10:38:19 AM	BCl3 MFC set to  0.000000
7/22/2011	10:38:19 AM	PHl3 MFC set to  0.000000
7/22/2011	10:38:19 AM	SiCl4 MFC set to  0.000000
7/22/2011	10:38:19 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	10:38:19 AM	Tube furnace set to 0
7/22/2011	10:38:22 AM	H2 valve closed
7/22/2011	10:38:22 AM	BCl3 valve closed
7/22/2011	10:38:22 AM	PH3 valve closed
7/22/2011	10:38:22 AM	SiCl4 pre valve closed
7/22/2011	10:38:22 AM	SiCl4 post valve closed
7/22/2011	10:38:22 AM	Main Vac valve closed
7/22/2011	10:38:22 AM	Bypass valve closed
7/22/2011	10:38:22 AM	Bubbler valve closed
7/22/2011	10:38:22 AM	Helium valve opened
7/22/2011	10:38:22 AM	Helium MFC set to  500.000000
7/22/2011	10:38:22 AM	H2 MFC set to  0.000000
7/22/2011	10:38:22 AM	BCl3 MFC set to  0.000000
7/22/2011	10:38:22 AM	PHl3 MFC set to  0.000000
7/22/2011	10:38:22 AM	SiCl4 MFC set to  0.000000
7/22/2011	10:38:22 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	10:38:23 AM	Tube furnace set to 0
7/22/2011	10:39:27 AM	Helium valve closed
7/22/2011	10:39:27 AM	H2 valve closed
7/22/2011	10:39:27 AM	BCl3 valve closed
7/22/2011	10:39:27 AM	PH3 valve closed
7/22/2011	10:39:27 AM	SiCl4 pre valve closed
7/22/2011	10:39:27 AM	SiCl4 post valve closed
7/22/2011	10:39:27 AM	Main Vac valve closed
7/22/2011	10:39:27 AM	Bypass valve closed
7/22/2011	10:39:27 AM	Bubbler valve closed
7/22/2011	10:39:27 AM	Helium MFC set to  0.000000
7/22/2011	10:39:27 AM	H2 MFC set to  0.000000
7/22/2011	10:39:27 AM	BCl3 MFC set to  0.000000
7/22/2011	10:39:27 AM	PHl3 MFC set to  0.000000
7/22/2011	10:39:27 AM	SiCl4 MFC set to  0.000000
7/22/2011	10:39:27 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	10:39:27 AM	Tube furnace set to 0
7/22/2011	10:39:28 AM	Run finished at 10:39 AM
7/22/2011	10:39:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/22/2011	10:45:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/22/2011	10:45:49 AM	Recipe started at 10:45 AM
7/22/2011	10:45:49 AM	Helium valve closed
7/22/2011	10:45:49 AM	H2 valve closed
7/22/2011	10:45:49 AM	BCl3 valve closed
7/22/2011	10:45:49 AM	PH3 valve closed
7/22/2011	10:45:49 AM	SiCl4 pre valve closed
7/22/2011	10:45:49 AM	SiCl4 post valve closed
7/22/2011	10:45:49 AM	Main Vac valve closed
7/22/2011	10:45:49 AM	Bubbler valve closed
7/22/2011	10:45:49 AM	Bypass valve opened
7/22/2011	10:45:49 AM	Helium MFC set to  0.000000
7/22/2011	10:45:49 AM	H2 MFC set to  0.000000
7/22/2011	10:45:49 AM	BCl3 MFC set to  0.000000
7/22/2011	10:45:49 AM	PHl3 MFC set to  0.000000
7/22/2011	10:45:49 AM	SiCl4 MFC set to  0.000000
7/22/2011	10:45:49 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	10:45:49 AM	Tube furnace set to 0
7/22/2011	10:45:55 AM	Run aborted at 10:45 AM
7/22/2011	10:45:55 AM	Helium valve closed
7/22/2011	10:45:55 AM	H2 valve closed
7/22/2011	10:45:55 AM	BCl3 valve closed
7/22/2011	10:45:55 AM	PH3 valve closed
7/22/2011	10:45:55 AM	SiCl4 pre valve closed
7/22/2011	10:45:55 AM	SiCl4 post valve closed
7/22/2011	10:45:55 AM	Bypass valve closed
7/22/2011	10:45:55 AM	Main Vac valve closed
7/22/2011	10:45:55 AM	Bubbler valve closed
7/22/2011	10:45:55 AM	Helium MFC set to  0.000000
7/22/2011	10:45:55 AM	H2 MFC set to  0.000000
7/22/2011	10:45:55 AM	BCl3 MFC set to  0.000000
7/22/2011	10:45:55 AM	PHl3 MFC set to  0.000000
7/22/2011	10:45:55 AM	SiCl4 MFC set to  0.000000
7/22/2011	10:45:55 AM	Tube furnace set to 0
7/22/2011	10:45:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/22/2011	10:45:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/22/2011	10:45:58 AM	Recipe started at 10:45 AM
7/22/2011	10:45:58 AM	Helium valve closed
7/22/2011	10:45:58 AM	H2 valve closed
7/22/2011	10:45:58 AM	BCl3 valve closed
7/22/2011	10:45:58 AM	PH3 valve closed
7/22/2011	10:45:58 AM	SiCl4 pre valve closed
7/22/2011	10:45:58 AM	SiCl4 post valve closed
7/22/2011	10:45:58 AM	Main Vac valve closed
7/22/2011	10:45:58 AM	Bypass valve closed
7/22/2011	10:45:58 AM	Bubbler valve closed
7/22/2011	10:45:58 AM	Helium MFC set to  0.000000
7/22/2011	10:45:58 AM	H2 MFC set to  0.000000
7/22/2011	10:45:58 AM	BCl3 MFC set to  0.000000
7/22/2011	10:45:58 AM	PHl3 MFC set to  0.000000
7/22/2011	10:45:58 AM	SiCl4 MFC set to  0.000000
7/22/2011	10:45:58 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	10:45:58 AM	Tube furnace set to 0
7/22/2011	10:46:01 AM	H2 valve closed
7/22/2011	10:46:01 AM	BCl3 valve closed
7/22/2011	10:46:01 AM	PH3 valve closed
7/22/2011	10:46:01 AM	SiCl4 pre valve closed
7/22/2011	10:46:01 AM	SiCl4 post valve closed
7/22/2011	10:46:01 AM	Main Vac valve closed
7/22/2011	10:46:01 AM	Bypass valve closed
7/22/2011	10:46:01 AM	Bubbler valve closed
7/22/2011	10:46:01 AM	Helium valve opened
7/22/2011	10:46:01 AM	Helium MFC set to  500.000000
7/22/2011	10:46:01 AM	H2 MFC set to  0.000000
7/22/2011	10:46:01 AM	BCl3 MFC set to  0.000000
7/22/2011	10:46:01 AM	PHl3 MFC set to  0.000000
7/22/2011	10:46:01 AM	SiCl4 MFC set to  0.000000
7/22/2011	10:46:01 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	10:46:01 AM	Tube furnace set to 0
7/22/2011	10:46:50 AM	Helium valve closed
7/22/2011	10:46:50 AM	H2 valve closed
7/22/2011	10:46:50 AM	BCl3 valve closed
7/22/2011	10:46:50 AM	PH3 valve closed
7/22/2011	10:46:50 AM	SiCl4 pre valve closed
7/22/2011	10:46:50 AM	SiCl4 post valve closed
7/22/2011	10:46:50 AM	Main Vac valve closed
7/22/2011	10:46:50 AM	Bypass valve closed
7/22/2011	10:46:50 AM	Bubbler valve closed
7/22/2011	10:46:50 AM	Helium MFC set to  0.000000
7/22/2011	10:46:50 AM	H2 MFC set to  0.000000
7/22/2011	10:46:50 AM	BCl3 MFC set to  0.000000
7/22/2011	10:46:50 AM	PHl3 MFC set to  0.000000
7/22/2011	10:46:50 AM	SiCl4 MFC set to  0.000000
7/22/2011	10:46:50 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	10:46:50 AM	Tube furnace set to 0
7/22/2011	10:46:51 AM	Run finished at 10:46 AM
7/22/2011	10:46:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/22/2011	10:59:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/22/2011	10:59:58 AM	Recipe started at 10:59 AM
7/22/2011	10:59:58 AM	Helium valve closed
7/22/2011	10:59:58 AM	H2 valve closed
7/22/2011	10:59:58 AM	BCl3 valve closed
7/22/2011	10:59:58 AM	PH3 valve closed
7/22/2011	10:59:58 AM	SiCl4 pre valve closed
7/22/2011	10:59:58 AM	SiCl4 post valve closed
7/22/2011	10:59:58 AM	Main Vac valve closed
7/22/2011	10:59:58 AM	Bubbler valve closed
7/22/2011	10:59:58 AM	Bypass valve opened
7/22/2011	10:59:58 AM	Helium MFC set to  0.000000
7/22/2011	10:59:58 AM	H2 MFC set to  0.000000
7/22/2011	10:59:58 AM	BCl3 MFC set to  0.000000
7/22/2011	10:59:58 AM	PHl3 MFC set to  0.000000
7/22/2011	10:59:58 AM	SiCl4 MFC set to  0.000000
7/22/2011	10:59:58 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	10:59:58 AM	Tube furnace set to 0
7/22/2011	11:01:06 AM	Helium valve closed
7/22/2011	11:01:06 AM	H2 valve closed
7/22/2011	11:01:06 AM	BCl3 valve closed
7/22/2011	11:01:06 AM	PH3 valve closed
7/22/2011	11:01:06 AM	SiCl4 pre valve closed
7/22/2011	11:01:06 AM	SiCl4 post valve closed
7/22/2011	11:01:06 AM	Main Vac valve closed
7/22/2011	11:01:06 AM	Bubbler valve closed
7/22/2011	11:01:06 AM	Bypass valve opened
7/22/2011	11:01:06 AM	Helium MFC set to  0.000000
7/22/2011	11:01:06 AM	H2 MFC set to  0.000000
7/22/2011	11:01:06 AM	BCl3 MFC set to  0.000000
7/22/2011	11:01:06 AM	PHl3 MFC set to  0.000000
7/22/2011	11:01:06 AM	SiCl4 MFC set to  0.000000
7/22/2011	11:01:06 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	11:01:06 AM	Tube furnace set to 0
7/22/2011	11:02:06 AM	Helium valve closed
7/22/2011	11:02:06 AM	H2 valve closed
7/22/2011	11:02:06 AM	BCl3 valve closed
7/22/2011	11:02:06 AM	PH3 valve closed
7/22/2011	11:02:06 AM	SiCl4 pre valve closed
7/22/2011	11:02:06 AM	SiCl4 post valve closed
7/22/2011	11:02:06 AM	Bypass valve closed
7/22/2011	11:02:06 AM	Bubbler valve closed
7/22/2011	11:02:06 AM	Main Vac valve opened
7/22/2011	11:02:06 AM	Helium MFC set to  0.000000
7/22/2011	11:02:06 AM	H2 MFC set to  0.000000
7/22/2011	11:02:06 AM	BCl3 MFC set to  0.000000
7/22/2011	11:02:06 AM	PHl3 MFC set to  0.000000
7/22/2011	11:02:06 AM	SiCl4 MFC set to  0.000000
7/22/2011	11:02:06 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	11:02:06 AM	Tube furnace set to 0
7/22/2011	11:02:07 AM	Run finished at 11:02 AM
7/22/2011	11:02:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/22/2011	11:40:45 AM	Recipe started at 11:40 AM
7/22/2011	11:40:45 AM	Helium valve closed
7/22/2011	11:40:45 AM	H2 valve closed
7/22/2011	11:40:45 AM	BCl3 valve closed
7/22/2011	11:40:45 AM	PH3 valve closed
7/22/2011	11:40:45 AM	SiCl4 pre valve closed
7/22/2011	11:40:45 AM	SiCl4 post valve closed
7/22/2011	11:40:45 AM	Main Vac valve closed
7/22/2011	11:40:45 AM	Bypass valve closed
7/22/2011	11:40:45 AM	Bubbler valve closed
7/22/2011	11:40:45 AM	Helium MFC set to  0.000000
7/22/2011	11:40:45 AM	H2 MFC set to  0.000000
7/22/2011	11:40:45 AM	BCl3 MFC set to  0.000000
7/22/2011	11:40:45 AM	PHl3 MFC set to  0.000000
7/22/2011	11:40:45 AM	SiCl4 MFC set to  0.000000
7/22/2011	11:40:45 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	11:40:46 AM	Tube furnace set to 0
7/22/2011	11:40:49 AM	Helium valve closed
7/22/2011	11:40:49 AM	BCl3 valve closed
7/22/2011	11:40:49 AM	PH3 valve closed
7/22/2011	11:40:49 AM	SiCl4 pre valve closed
7/22/2011	11:40:49 AM	SiCl4 post valve closed
7/22/2011	11:40:49 AM	Main Vac valve closed
7/22/2011	11:40:49 AM	Bypass valve closed
7/22/2011	11:40:49 AM	Bubbler valve closed
7/22/2011	11:40:49 AM	H2 valve opened
7/22/2011	11:40:49 AM	Helium MFC set to  0.000000
7/22/2011	11:40:49 AM	H2 MFC set to  500.000000
7/22/2011	11:40:49 AM	BCl3 MFC set to  0.000000
7/22/2011	11:40:49 AM	PHl3 MFC set to  0.000000
7/22/2011	11:40:49 AM	SiCl4 MFC set to  0.000000
7/22/2011	11:40:49 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	11:40:49 AM	Tube furnace set to 0
7/22/2011	11:41:55 AM	Helium valve closed
7/22/2011	11:41:55 AM	BCl3 valve closed
7/22/2011	11:41:55 AM	PH3 valve closed
7/22/2011	11:41:55 AM	SiCl4 pre valve closed
7/22/2011	11:41:55 AM	SiCl4 post valve closed
7/22/2011	11:41:55 AM	Main Vac valve closed
7/22/2011	11:41:55 AM	Bypass valve closed
7/22/2011	11:41:55 AM	H2 valve opened
7/22/2011	11:41:55 AM	Bubbler valve opened
7/22/2011	11:41:55 AM	Helium MFC set to  0.000000
7/22/2011	11:41:55 AM	H2 MFC set to  500.000000
7/22/2011	11:41:55 AM	BCl3 MFC set to  0.000000
7/22/2011	11:41:55 AM	PHl3 MFC set to  0.000000
7/22/2011	11:41:55 AM	SiCl4 MFC set to  0.000000
7/22/2011	11:41:55 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	11:41:55 AM	Tube furnace set to 0
7/22/2011	11:41:56 AM	Helium valve closed
7/22/2011	11:41:56 AM	BCl3 valve closed
7/22/2011	11:41:56 AM	PH3 valve closed
7/22/2011	11:41:56 AM	SiCl4 pre valve closed
7/22/2011	11:41:56 AM	SiCl4 post valve closed
7/22/2011	11:41:56 AM	Main Vac valve closed
7/22/2011	11:41:56 AM	Bypass valve closed
7/22/2011	11:41:56 AM	H2 valve opened
7/22/2011	11:41:56 AM	Bubbler valve opened
7/22/2011	11:41:56 AM	Helium MFC set to  0.000000
7/22/2011	11:41:56 AM	H2 MFC set to  500.000000
7/22/2011	11:41:56 AM	BCl3 MFC set to  0.000000
7/22/2011	11:41:56 AM	PHl3 MFC set to  0.000000
7/22/2011	11:41:56 AM	SiCl4 MFC set to  0.000000
7/22/2011	11:41:56 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	11:41:56 AM	Tube furnace set to 1000
7/22/2011	11:50:27 AM	Helium valve closed
7/22/2011	11:50:27 AM	BCl3 valve closed
7/22/2011	11:50:27 AM	PH3 valve closed
7/22/2011	11:50:27 AM	SiCl4 pre valve closed
7/22/2011	11:50:27 AM	SiCl4 post valve closed
7/22/2011	11:50:27 AM	Main Vac valve closed
7/22/2011	11:50:27 AM	Bypass valve closed
7/22/2011	11:50:27 AM	H2 valve opened
7/22/2011	11:50:27 AM	Bubbler valve opened
7/22/2011	11:50:27 AM	Helium MFC set to  0.000000
7/22/2011	11:50:27 AM	H2 MFC set to  500.000000
7/22/2011	11:50:27 AM	BCl3 MFC set to  0.000000
7/22/2011	11:50:27 AM	PHl3 MFC set to  0.000000
7/22/2011	11:50:27 AM	SiCl4 MFC set to  0.000000
7/22/2011	11:50:27 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	11:50:27 AM	Tube furnace set to 750
7/22/2011	11:50:27 AM	H2 valve closed
7/22/2011	11:50:27 AM	BCl3 valve closed
7/22/2011	11:50:27 AM	PH3 valve closed
7/22/2011	11:50:27 AM	SiCl4 pre valve closed
7/22/2011	11:50:27 AM	SiCl4 post valve closed
7/22/2011	11:50:27 AM	Main Vac valve closed
7/22/2011	11:50:27 AM	Bypass valve closed
7/22/2011	11:50:27 AM	Helium valve opened
7/22/2011	11:50:27 AM	Bubbler valve opened
7/22/2011	11:50:27 AM	Helium MFC set to  500.000000
7/22/2011	11:50:27 AM	H2 MFC set to  0.000000
7/22/2011	11:50:27 AM	BCl3 MFC set to  0.000000
7/22/2011	11:50:27 AM	PHl3 MFC set to  0.000000
7/22/2011	11:50:27 AM	SiCl4 MFC set to  0.000000
7/22/2011	11:50:27 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	11:50:28 AM	Tube furnace set to 0
7/22/2011	11:50:28 AM	Helium valve closed
7/22/2011	11:50:28 AM	H2 valve closed
7/22/2011	11:50:28 AM	BCl3 valve closed
7/22/2011	11:50:28 AM	PH3 valve closed
7/22/2011	11:50:28 AM	SiCl4 pre valve closed
7/22/2011	11:50:28 AM	SiCl4 post valve closed
7/22/2011	11:50:28 AM	Main Vac valve closed
7/22/2011	11:50:28 AM	Bypass valve closed
7/22/2011	11:50:28 AM	Bubbler valve closed
7/22/2011	11:50:28 AM	Helium MFC set to  0.000000
7/22/2011	11:50:28 AM	H2 MFC set to  0.000000
7/22/2011	11:50:28 AM	BCl3 MFC set to  0.000000
7/22/2011	11:50:28 AM	PHl3 MFC set to  0.000000
7/22/2011	11:50:28 AM	SiCl4 MFC set to  0.000000
7/22/2011	11:50:28 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	11:50:28 AM	Tube furnace set to 0
7/22/2011	11:50:28 AM	Run finished at 11:50 AM
7/22/2011	11:50:49 AM	Recipe started at 11:50 AM
7/22/2011	11:50:49 AM	Helium valve closed
7/22/2011	11:50:49 AM	H2 valve closed
7/22/2011	11:50:49 AM	BCl3 valve closed
7/22/2011	11:50:49 AM	PH3 valve closed
7/22/2011	11:50:49 AM	SiCl4 pre valve closed
7/22/2011	11:50:49 AM	SiCl4 post valve closed
7/22/2011	11:50:49 AM	Main Vac valve closed
7/22/2011	11:50:49 AM	Bypass valve closed
7/22/2011	11:50:49 AM	Bubbler valve closed
7/22/2011	11:50:49 AM	Helium MFC set to  0.000000
7/22/2011	11:50:49 AM	H2 MFC set to  0.000000
7/22/2011	11:50:49 AM	BCl3 MFC set to  0.000000
7/22/2011	11:50:49 AM	PHl3 MFC set to  0.000000
7/22/2011	11:50:49 AM	SiCl4 MFC set to  0.000000
7/22/2011	11:50:49 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	11:50:49 AM	Tube furnace set to 0
7/22/2011	11:50:52 AM	Helium valve closed
7/22/2011	11:50:52 AM	BCl3 valve closed
7/22/2011	11:50:52 AM	PH3 valve closed
7/22/2011	11:50:52 AM	SiCl4 pre valve closed
7/22/2011	11:50:52 AM	SiCl4 post valve closed
7/22/2011	11:50:52 AM	Main Vac valve closed
7/22/2011	11:50:52 AM	Bypass valve closed
7/22/2011	11:50:52 AM	Bubbler valve closed
7/22/2011	11:50:52 AM	H2 valve opened
7/22/2011	11:50:52 AM	Helium MFC set to  0.000000
7/22/2011	11:50:52 AM	H2 MFC set to  500.000000
7/22/2011	11:50:52 AM	BCl3 MFC set to  0.000000
7/22/2011	11:50:52 AM	PHl3 MFC set to  0.000000
7/22/2011	11:50:52 AM	SiCl4 MFC set to  0.000000
7/22/2011	11:50:52 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	11:50:52 AM	Tube furnace set to 0
7/22/2011	11:50:54 AM	Helium valve closed
7/22/2011	11:50:54 AM	BCl3 valve closed
7/22/2011	11:50:54 AM	PH3 valve closed
7/22/2011	11:50:54 AM	SiCl4 pre valve closed
7/22/2011	11:50:54 AM	SiCl4 post valve closed
7/22/2011	11:50:54 AM	Main Vac valve closed
7/22/2011	11:50:54 AM	Bypass valve closed
7/22/2011	11:50:54 AM	H2 valve opened
7/22/2011	11:50:54 AM	Bubbler valve opened
7/22/2011	11:50:54 AM	Helium MFC set to  0.000000
7/22/2011	11:50:54 AM	H2 MFC set to  500.000000
7/22/2011	11:50:54 AM	BCl3 MFC set to  0.000000
7/22/2011	11:50:54 AM	PHl3 MFC set to  0.000000
7/22/2011	11:50:54 AM	SiCl4 MFC set to  0.000000
7/22/2011	11:50:54 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	11:50:54 AM	Tube furnace set to 0
7/22/2011	11:50:55 AM	Helium valve closed
7/22/2011	11:50:55 AM	BCl3 valve closed
7/22/2011	11:50:55 AM	PH3 valve closed
7/22/2011	11:50:55 AM	SiCl4 pre valve closed
7/22/2011	11:50:55 AM	SiCl4 post valve closed
7/22/2011	11:50:55 AM	Main Vac valve closed
7/22/2011	11:50:55 AM	Bypass valve closed
7/22/2011	11:50:55 AM	H2 valve opened
7/22/2011	11:50:55 AM	Bubbler valve opened
7/22/2011	11:50:55 AM	Helium MFC set to  0.000000
7/22/2011	11:50:55 AM	H2 MFC set to  500.000000
7/22/2011	11:50:55 AM	BCl3 MFC set to  0.000000
7/22/2011	11:50:55 AM	PHl3 MFC set to  0.000000
7/22/2011	11:50:55 AM	SiCl4 MFC set to  0.000000
7/22/2011	11:50:55 AM	Bypass solenoid MFC set to  0.000000
7/22/2011	11:50:55 AM	Tube furnace set to 1000
7/22/2011	12:10:55 PM	Helium valve closed
7/22/2011	12:10:55 PM	BCl3 valve closed
7/22/2011	12:10:55 PM	PH3 valve closed
7/22/2011	12:10:55 PM	SiCl4 pre valve closed
7/22/2011	12:10:55 PM	SiCl4 post valve closed
7/22/2011	12:10:55 PM	Main Vac valve closed
7/22/2011	12:10:55 PM	Bypass valve closed
7/22/2011	12:10:55 PM	H2 valve opened
7/22/2011	12:10:55 PM	Bubbler valve opened
7/22/2011	12:10:55 PM	Helium MFC set to  0.000000
7/22/2011	12:10:55 PM	H2 MFC set to  500.000000
7/22/2011	12:10:55 PM	BCl3 MFC set to  0.000000
7/22/2011	12:10:55 PM	PHl3 MFC set to  0.000000
7/22/2011	12:10:55 PM	SiCl4 MFC set to  0.000000
7/22/2011	12:10:55 PM	Bypass solenoid MFC set to  0.000000
7/22/2011	12:10:56 PM	Tube furnace set to 750
7/22/2011	12:15:56 PM	H2 valve closed
7/22/2011	12:15:56 PM	BCl3 valve closed
7/22/2011	12:15:56 PM	PH3 valve closed
7/22/2011	12:15:56 PM	SiCl4 pre valve closed
7/22/2011	12:15:56 PM	SiCl4 post valve closed
7/22/2011	12:15:56 PM	Main Vac valve closed
7/22/2011	12:15:56 PM	Bypass valve closed
7/22/2011	12:15:56 PM	Helium valve opened
7/22/2011	12:15:56 PM	Bubbler valve opened
7/22/2011	12:15:56 PM	Helium MFC set to  500.000000
7/22/2011	12:15:56 PM	H2 MFC set to  0.000000
7/22/2011	12:15:56 PM	BCl3 MFC set to  0.000000
7/22/2011	12:15:56 PM	PHl3 MFC set to  0.000000
7/22/2011	12:15:56 PM	SiCl4 MFC set to  0.000000
7/22/2011	12:15:56 PM	Bypass solenoid MFC set to  0.000000
7/22/2011	12:15:56 PM	Tube furnace set to 0
7/22/2011	12:35:56 PM	Helium valve closed
7/22/2011	12:35:56 PM	H2 valve closed
7/22/2011	12:35:56 PM	BCl3 valve closed
7/22/2011	12:35:56 PM	PH3 valve closed
7/22/2011	12:35:56 PM	SiCl4 pre valve closed
7/22/2011	12:35:56 PM	SiCl4 post valve closed
7/22/2011	12:35:56 PM	Main Vac valve closed
7/22/2011	12:35:56 PM	Bypass valve closed
7/22/2011	12:35:56 PM	Bubbler valve closed
7/22/2011	12:35:56 PM	Helium MFC set to  0.000000
7/22/2011	12:35:56 PM	H2 MFC set to  0.000000
7/22/2011	12:35:56 PM	BCl3 MFC set to  0.000000
7/22/2011	12:35:56 PM	PHl3 MFC set to  0.000000
7/22/2011	12:35:56 PM	SiCl4 MFC set to  0.000000
7/22/2011	12:35:56 PM	Bypass solenoid MFC set to  0.000000
7/22/2011	12:35:56 PM	Tube furnace set to 0
7/22/2011	12:35:57 PM	Run finished at 12:35 PM
7/22/2011	1:48:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/22/2011	1:48:01 PM	Recipe started at 1:48 PM
7/22/2011	1:48:01 PM	Helium valve closed
7/22/2011	1:48:01 PM	H2 valve closed
7/22/2011	1:48:01 PM	BCl3 valve closed
7/22/2011	1:48:01 PM	PH3 valve closed
7/22/2011	1:48:01 PM	SiCl4 pre valve closed
7/22/2011	1:48:01 PM	SiCl4 post valve closed
7/22/2011	1:48:01 PM	Main Vac valve closed
7/22/2011	1:48:01 PM	Bypass valve closed
7/22/2011	1:48:01 PM	Bubbler valve closed
7/22/2011	1:48:01 PM	Helium MFC set to  0.000000
7/22/2011	1:48:01 PM	H2 MFC set to  0.000000
7/22/2011	1:48:01 PM	BCl3 MFC set to  0.000000
7/22/2011	1:48:01 PM	PHl3 MFC set to  0.000000
7/22/2011	1:48:01 PM	SiCl4 MFC set to  0.000000
7/22/2011	1:48:01 PM	Bypass solenoid MFC set to  0.000000
7/22/2011	1:48:02 PM	Tube furnace set to 0
7/22/2011	1:48:05 PM	H2 valve closed
7/22/2011	1:48:05 PM	BCl3 valve closed
7/22/2011	1:48:05 PM	PH3 valve closed
7/22/2011	1:48:05 PM	SiCl4 pre valve closed
7/22/2011	1:48:05 PM	SiCl4 post valve closed
7/22/2011	1:48:05 PM	Main Vac valve closed
7/22/2011	1:48:05 PM	Bypass valve closed
7/22/2011	1:48:05 PM	Bubbler valve closed
7/22/2011	1:48:05 PM	Helium valve opened
7/22/2011	1:48:05 PM	Helium MFC set to  500.000000
7/22/2011	1:48:05 PM	H2 MFC set to  0.000000
7/22/2011	1:48:05 PM	BCl3 MFC set to  0.000000
7/22/2011	1:48:05 PM	PHl3 MFC set to  0.000000
7/22/2011	1:48:05 PM	SiCl4 MFC set to  0.000000
7/22/2011	1:48:05 PM	Bypass solenoid MFC set to  0.000000
7/22/2011	1:48:05 PM	Tube furnace set to 0
7/22/2011	1:48:06 PM	Helium valve closed
7/22/2011	1:48:06 PM	H2 valve closed
7/22/2011	1:48:06 PM	BCl3 valve closed
7/22/2011	1:48:06 PM	PH3 valve closed
7/22/2011	1:48:06 PM	SiCl4 pre valve closed
7/22/2011	1:48:06 PM	SiCl4 post valve closed
7/22/2011	1:48:06 PM	Main Vac valve closed
7/22/2011	1:48:06 PM	Bypass valve closed
7/22/2011	1:48:06 PM	Bubbler valve closed
7/22/2011	1:48:06 PM	Helium MFC set to  0.000000
7/22/2011	1:48:06 PM	H2 MFC set to  0.000000
7/22/2011	1:48:06 PM	BCl3 MFC set to  0.000000
7/22/2011	1:48:06 PM	PHl3 MFC set to  0.000000
7/22/2011	1:48:06 PM	SiCl4 MFC set to  0.000000
7/22/2011	1:48:06 PM	Bypass solenoid MFC set to  0.000000
7/22/2011	1:48:06 PM	Tube furnace set to 0
7/22/2011	1:48:07 PM	Run finished at 1:48 PM
7/22/2011	1:48:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/22/2011	1:58:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/22/2011	1:58:48 PM	Recipe started at 1:58 PM
7/22/2011	1:58:48 PM	Helium valve closed
7/22/2011	1:58:48 PM	H2 valve closed
7/22/2011	1:58:48 PM	BCl3 valve closed
7/22/2011	1:58:48 PM	PH3 valve closed
7/22/2011	1:58:48 PM	SiCl4 pre valve closed
7/22/2011	1:58:48 PM	SiCl4 post valve closed
7/22/2011	1:58:48 PM	Main Vac valve closed
7/22/2011	1:58:48 PM	Bubbler valve closed
7/22/2011	1:58:48 PM	Bypass valve opened
7/22/2011	1:58:48 PM	Helium MFC set to  0.000000
7/22/2011	1:58:48 PM	H2 MFC set to  0.000000
7/22/2011	1:58:48 PM	BCl3 MFC set to  0.000000
7/22/2011	1:58:48 PM	PHl3 MFC set to  0.000000
7/22/2011	1:58:48 PM	SiCl4 MFC set to  0.000000
7/22/2011	1:58:48 PM	Bypass solenoid MFC set to  0.000000
7/22/2011	1:58:48 PM	Tube furnace set to 0
7/22/2011	1:59:56 PM	Helium valve closed
7/22/2011	1:59:56 PM	H2 valve closed
7/22/2011	1:59:56 PM	BCl3 valve closed
7/22/2011	1:59:56 PM	PH3 valve closed
7/22/2011	1:59:56 PM	SiCl4 pre valve closed
7/22/2011	1:59:56 PM	SiCl4 post valve closed
7/22/2011	1:59:56 PM	Main Vac valve closed
7/22/2011	1:59:56 PM	Bubbler valve closed
7/22/2011	1:59:56 PM	Bypass valve opened
7/22/2011	1:59:56 PM	Helium MFC set to  0.000000
7/22/2011	1:59:56 PM	H2 MFC set to  0.000000
7/22/2011	1:59:56 PM	BCl3 MFC set to  0.000000
7/22/2011	1:59:56 PM	PHl3 MFC set to  0.000000
7/22/2011	1:59:56 PM	SiCl4 MFC set to  0.000000
7/22/2011	1:59:56 PM	Bypass solenoid MFC set to  0.000000
7/22/2011	1:59:56 PM	Tube furnace set to 0
7/22/2011	2:00:56 PM	Helium valve closed
7/22/2011	2:00:56 PM	H2 valve closed
7/22/2011	2:00:56 PM	BCl3 valve closed
7/22/2011	2:00:56 PM	PH3 valve closed
7/22/2011	2:00:56 PM	SiCl4 pre valve closed
7/22/2011	2:00:56 PM	SiCl4 post valve closed
7/22/2011	2:00:56 PM	Bypass valve closed
7/22/2011	2:00:56 PM	Bubbler valve closed
7/22/2011	2:00:56 PM	Main Vac valve opened
7/22/2011	2:00:56 PM	Helium MFC set to  0.000000
7/22/2011	2:00:56 PM	H2 MFC set to  0.000000
7/22/2011	2:00:56 PM	BCl3 MFC set to  0.000000
7/22/2011	2:00:56 PM	PHl3 MFC set to  0.000000
7/22/2011	2:00:56 PM	SiCl4 MFC set to  0.000000
7/22/2011	2:00:56 PM	Bypass solenoid MFC set to  0.000000
7/22/2011	2:00:56 PM	Tube furnace set to 0
7/22/2011	2:00:57 PM	Run finished at 2:00 PM
7/22/2011	2:00:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
